JPS6085346A - 圧電型指圧計 - Google Patents
圧電型指圧計Info
- Publication number
- JPS6085346A JPS6085346A JP19390583A JP19390583A JPS6085346A JP S6085346 A JPS6085346 A JP S6085346A JP 19390583 A JP19390583 A JP 19390583A JP 19390583 A JP19390583 A JP 19390583A JP S6085346 A JPS6085346 A JP S6085346A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- piezoelectric element
- case
- acceleration correction
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/02—Arrangements for preventing, or for compensating for, effects of inclination or acceleration of the measuring device; Zero-setting means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/008—Transmitting or indicating the displacement of flexible diaphragms using piezoelectric devices
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19390583A JPS6085346A (ja) | 1983-10-17 | 1983-10-17 | 圧電型指圧計 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19390583A JPS6085346A (ja) | 1983-10-17 | 1983-10-17 | 圧電型指圧計 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6085346A true JPS6085346A (ja) | 1985-05-14 |
JPH0430538B2 JPH0430538B2 (en]) | 1992-05-22 |
Family
ID=16315686
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19390583A Granted JPS6085346A (ja) | 1983-10-17 | 1983-10-17 | 圧電型指圧計 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6085346A (en]) |
-
1983
- 1983-10-17 JP JP19390583A patent/JPS6085346A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPH0430538B2 (en]) | 1992-05-22 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP0144185B1 (en) | Electrochemical device | |
US3270554A (en) | Diffused layer transducers | |
KR890001983B1 (ko) | 산소농도센서 | |
FR2446534A1 (fr) | Condensateur electrique a double couche | |
US3727084A (en) | Accelerometer utilizing shear responsive x-cut lithium niobate | |
JPH06133397A (ja) | 圧電センサ | |
US4065971A (en) | Semiconductor pressure transducer | |
JP2699619B2 (ja) | 電歪効果素子 | |
US5551294A (en) | Micromachined measuring cell with arm supported sensor | |
JP3549539B2 (ja) | 磁気弾性的な非接触型のトルクトランスデューサ | |
JPS6085346A (ja) | 圧電型指圧計 | |
JPS59158566A (ja) | 半導体加速度センサ | |
US3235826A (en) | Pressure transducer | |
US20090241669A1 (en) | Coupled pivoted acceleration sensors | |
JP2007333665A (ja) | 加速度センサ及び加速度センサの製造方法 | |
JP3097411B2 (ja) | 加速度センサ | |
JPS6085345A (ja) | 圧電型指圧計 | |
JP4019910B2 (ja) | 力検知素子とその製造方法 | |
JP2737479B2 (ja) | 半導体応力検出装置 | |
JP2019007754A (ja) | 圧力センサ | |
JP2007171040A (ja) | 物理量センサ | |
JP2669216B2 (ja) | 半導体応力検出装置 | |
JPH03106082A (ja) | 積層形圧電アクチュエータ素子 | |
JPH0110940Y2 (en]) | ||
CN115885175A (zh) | 具有四个接触面和三个镀通孔的传感器元件 |